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- Atomic layer deposition of high-κ dielectrics on nitrided silicon surfaces - art. no. 192110 Journal Article
 - Atomic layer deposition of iron(III) oxide on zirconia nanoparticles in a fluidized bed reactor using ferrocene and oxygen Journal Article
 - Atomic Layer Deposition of Metal Fluorides Using HF-Pyridine as the Fluorine Precursor Journal Article
 - Atomic Layer Deposition of MgO Using Bis(ethylcyclopentadienyl)magnesium and H2O Journal Article
 - Atomic layer deposition of MnO using Bis(ethylcyclopentadienyl) manganese and H2O Journal Article
 - Atomic Layer Deposition of Platinum Nanoparticles on Titanium Oxide and Tungsten Oxide Using Platinum(II) Hexafluoroacetylacetonate and Formalin as the Reactants Journal Article
 - Atomic layer deposition of quantum-confined ZnO nanostructures Journal Article
 - Atomic layer deposition of SiO2 films on BN particles using sequential surface reactions Journal Article
 - Atomic layer deposition of SiO2 and TiO2 in alumina tubular membranes:: Pore reduction and effect of surface species on gas transport Journal Article
 - Atomic layer deposition of SiO2 at room temperature using NH3-catalyzed sequential surface reactions Journal Article
 - Atomic layer deposition of SiO2 using catalyzed and uncatalyzed self-limiting surface reactions Journal Article
 - Atomic layer deposition of solid lubricating coatings on particles Journal Article
 - Atomic Layer Deposition of Tantalum Nitride Using A Novel Precursor Journal Article
 - Atomic layer deposition of TiO2 films on particles in a fluidized bed reactor Journal Article
 - Atomic layer deposition of TiO2 for stabilization of Pt nanoparticle oxygen reduction reaction catalysts Journal Article
 - Atomic Layer Deposition of TiO2 on Graphene for Supercapacitors Journal Article
 - Atomic layer deposition of tungsten nitride films as protective barriers to hydrogen Journal Article
 - Atomic layer deposition of tungsten nitride films using sequential surface reactions Journal Article
 - Atomic layer deposition of tungsten using sequential surface chemistry with a sacrificial stripping reaction Journal Article
 - Atomic layer deposition of ultrathin and conformal Al2O3 films on BN particles Journal Article
 - Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates Journal Article
 - Atomic layer deposition of UV-absorbing ZnO films on SiO2 and TiO2 nanoparticles using a fluidized bed reactor Journal Article
 - Atomic layer deposition of vanadium oxide to reduce parasitic absorption and improve stability in n-i-p perovskite solar cells for tandems Journal Article
 - Atomic Layer Deposition of Zn(O,S) Alloys Using Diethylzinc with H2O and H2S: Effect of Exchange Reactions Journal Article
 - Atomic layer deposition on bulk quantities of surfactant-modified single-walled carbon nanotubes Journal Article
 - Atomic layer deposition on gram quantities of multi-walled carbon nanotubes Journal Article
 - Atomic layer deposition on particles using a fluidized bed reactor with in situ mass spectrometry Journal Article
 - Atomic layer deposition ultrathin film origami using focused ion beams Journal Article
 - Atomic layer deposition-A novel method for the ultrathin coating of minitablets Journal Article
 - Atomic Layer Deposition: An Overview Journal Article