Atomic layer deposition of tungsten using sequential surface chemistry with a sacrificial stripping reaction Journal Article uri icon

Overview

publication date

  • February 1, 2000

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Klaus JW; Ferro SJ; George SM

author count

  • 3

citation count

  • 173

Other Profiles

International Standard Serial Number (ISSN)

  • 0040-6090

Additional Document Info

start page

  • 145

end page

  • 153

volume

  • 360

issue

  • 1-2