Atomic layer deposition of SiO2 using catalyzed and uncatalyzed self-limiting surface reactions
Journal Article
Overview
publication date
- June 1, 1999
has restriction
- closed
Date in CU Experts
- September 6, 2013 4:39 AM
Full Author List
- Klaus JW; Sneh O; Ott AW; George SM
author count
- 4
citation count
- 48
published in
- Surface Review and Letters Journal
Other Profiles
International Standard Serial Number (ISSN)
- 0218-625X
Digital Object Identifier (DOI)
Additional Document Info
start page
- 435
end page
- 448
volume
- 6
issue
- 3-4