Mechanism of Thermal Atomic Layer Etching of Hafnium Zirconium Oxide, HfO2 and ZrO2 Using Sequential HF and Acetylacetone Exposures Journal Article uri icon

Overview

publication date

  • August 12, 2025

Date in CU Experts

  • August 16, 2025 5:05 AM

Full Author List

  • Colleran TA; Abdulagatov AI; Partridge JL; Cavanagh AS; George SM

author count

  • 5

citation count

  • 0

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 5935

end page

  • 5945

volume

  • 37

issue

  • 15