Thermal Atomic Layer Etching of Zinc Oxide from 30-300 °C Using Sequential Exposures of Hydrogen Fluoride and Trimethylgallium Journal Article uri icon

Overview

publication date

  • March 31, 2025

Date in CU Experts

  • April 21, 2025 2:45 AM

Full Author List

  • Nam T; Zywotko DR; Colleran TA; Partridge JL; George SM

author count

  • 5

citation count

  • 0

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Electronic International Standard Serial Number (EISSN)

  • 1520-5002

Additional Document Info

start page

  • 2844

end page

  • 2854

volume

  • 37

issue

  • 8