Electromagnetic Design of Excitation Coils for an Inductively-Coupled Plasma Etching System
Conference Proceeding
Overview
publication date
- April 15, 2024
has restriction
- closed
Date in CU Experts
- January 1, 2025 2:32 AM
Full Author List
- Molles J; Popovic Z; Shukla P; Peng S
author count
- 4
citation count
- 0