EUV Scatterometry - Low-Dose Characterization of Polymer-based Metamaterials Conference Proceeding

Overview

CU Boulder Authors

publication date

February 26, 2024

Date in CU Experts

June 18, 2024 5:02 AM

Full Author List

Jenkins NW; Esashi Y; Shao Y; Tanksalvala M; Kapteyn HC; Murnane MM; Atkinson M

Full Editor List

Sendelbach MJ; Schuch NG

author count

7

citation count

0

published in

Proceedings of SPIE Journal

presented at event

Conference on Metrology, Inspection, and Process Control XXXVIII Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.3009911

International Standard Book Number (ISBN) 13

978-1-5106-7216-1

Additional Document Info

volume

12955