Progress and future directions for atomic layer deposition and ALD-based chemistry Journal Article uri icon

Overview

publication date

  • November 1, 2011

has restriction

  • bronze

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Parsons GN; George SM; Knez M

author count

  • 3

citation count

  • 185

Other Profiles

International Standard Serial Number (ISSN)

  • 0883-7694

Electronic International Standard Serial Number (EISSN)

  • 1938-1425

Additional Document Info

start page

  • 865

end page

  • 871

volume

  • 36

issue

  • 11