MODELING SILICON EPITAXIAL-GROWTH WITH SIH2CL2 Journal Article

Overview

CU Boulder Authors

• George, Steven

publication date

• May 1, 1993

has restriction

• closed

Date in CU Experts

• September 6, 2013 4:38 AM

Full Author List

• COON PA; WISE ML; GEORGE SM

author count

• 3

citation count

• 26

published in

• Journal of Crystal Growth  Journal

Other Profiles

International Standard Serial Number (ISSN)

• 0022-0248

Digital Object Identifier (DOI)

• https://doi.org/10.1016/0022-0248(93)90848-q

Additional Document Info

start page

• 162

end page

• 172

volume

• 130

issue

• 1-2