Keynote lecture: Atomic layer deposition of Al2O3, ZnO and Al2O3/ZnO nanolaminates using sequential surface reactions in a viscous flow reactor. Journal Article uri icon

Overview

publication date

  • April 1, 2001

Date in CU Experts

  • September 6, 2013 4:38 AM

Full Author List

  • George SM; Elam JW; Groner MD

author count

  • 3

citation count

  • 0

Other Profiles

International Standard Serial Number (ISSN)

  • 0065-7727

Additional Document Info

start page

  • U359

end page

  • U360

volume

  • 221