Modeling of thermal actuation in a bulk-micromachined CMOS micromirror Journal Article uri icon

Overview

publication date

  • October 1, 2000

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 12:44 PM

Full Author List

  • Liew LA; Tuantranont A; Bright VM

author count

  • 3

citation count

  • 26

Other Profiles

International Standard Serial Number (ISSN)

  • 0959-8324

Electronic International Standard Serial Number (EISSN)

  • 1879-2391

Additional Document Info

start page

  • 791

end page

  • 801

volume

  • 31

issue

  • 9-10