Mechanisms of Thermal Atomic Layer Etching Journal Article

Overview

CU Boulder Authors

• George, Steven

publication date

• June 16, 2020

has restriction

• bronze

Date in CU Experts

• June 3, 2020 12:51 PM

Full Author List

• George SM

author count

• 1

citation count

• 116

published in

• Accounts of Chemical Research  Journal

Other Profiles

International Standard Serial Number (ISSN)

• 0001-4842

Electronic International Standard Serial Number (EISSN)

• 1520-4898

Digital Object Identifier (DOI)

• https://doi.org/10.1021/acs.accounts.0c00084

Additional Document Info

start page

• 1151

end page

• 1160

volume

• 53

issue

• 6