Modified method of plasma-enhanced chemical vapor deposition of nanocrystalline silicon Journal Article uri icon

Overview

publication date

  • October 1, 1998

has restriction

  • closed

Date in CU Experts

  • November 14, 2019 10:24 AM

Full Author List

  • Golubev VG; Medvedev AV; Pevtsov AB; Feoktistov NA

author count

  • 4

citation count

  • 2

Other Profiles

International Standard Serial Number (ISSN)

  • 1063-7850

Additional Document Info

start page

  • 758

end page

  • 759

volume

  • 24

issue

  • 10