Magnetic field effect on the sheath thickness in plasma immersion ion implantation Journal Article uri icon

Overview

publication date

  • August 12, 2002

has restriction

  • green

Date in CU Experts

  • August 13, 2019 12:34 PM

Full Author List

  • Keidar M; Monteiro OR; Anders A; Boyd ID

author count

  • 4

citation count

  • 44

Other Profiles

International Standard Serial Number (ISSN)

  • 0003-6951

Electronic International Standard Serial Number (EISSN)

  • 1077-3118

Additional Document Info

start page

  • 1183

end page

  • 1185

volume

  • 81

issue

  • 7