A chemical mechanism for nitrogen incorporation into HfO2 ALD films using ammonia and alkylamide as precursors Journal Article uri icon

Overview

publication date

  • October 20, 2005

has restriction

  • closed

Date in CU Experts

  • May 29, 2019 3:44 AM

Full Author List

  • Xu Y; Musgrave CB

author count

  • 2

citation count

  • 11

Other Profiles

International Standard Serial Number (ISSN)

  • 0039-6028

Electronic International Standard Serial Number (EISSN)

  • 1879-2758

Additional Document Info

start page

  • L280

end page

  • L285

volume

  • 591

issue

  • 1-3