Progress and prospects in nanoscale dry processes: How can we control atomic layer reactions? Journal Article uri icon

Overview

publication date

  • June 1, 2017

has restriction

  • green

Date in CU Experts

  • February 18, 2018 8:14 AM

Full Author List

  • Ishikawa K; Karahashi K; Ichiki T; Chang JP; George SM; Kessels WMM; Lee HJ; Tinck S; Um JH; Kinoshita K

author count

  • 10

citation count

  • 50

Other Profiles

International Standard Serial Number (ISSN)

  • 0021-4922

Electronic International Standard Serial Number (EISSN)

  • 1347-4065

Additional Document Info

volume

  • 56

issue

  • 6

number

  • ARTN 06HA02